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Hankkija
Vastaanotettu Hilmaan | 2022-06-02 |
Ilmoituksen numero | 2022-102626 |
TED numero | |
Ostajaorganisaatio | VTT Technical Research Centre of Finland Ltd (2647375-4 ) P.O. Box 1000, VTT FI-02044 Espoo https://www.vttresearch.com/en |
Hankinnan otsikkotiedot | RTP/RTA tool |
Hankinnan yhteenlaskettu kokonaisarvo koko ajalle (ilman alv:ta) arvio | |
Hankinnan yhteenlaskettu kokonaisarvo koko ajalle (ilman alv:ta) lopullinen | |
Alkuperäinen ilmoitus | https://www.hankintailmoitukset.fi/sv/public/procurement/71709/notice/102626/overview |
Originaali JSON tietue | 102626.json |
Ostettava
Hankinnan lyhyt kuvaus | The object of the tender process is an RTP/RTA tool = Rapid Thermal Annealing/Processing tool (later also “RTP/RTA tool” or “Equipment”). VTT is looking for an RTP/RTA tool for Single or multi wafer manual loading 150 mm, 200 mm and 300 mm rapid thermal annealing or processing tool to be used for dopant activation, reactive annealing, and thin film annealing. Tool will be used in processing of various micro- and nanosystems. The object of the tender process is described in more detail in the invitation to tender documents. The technical specification of the equipment to be supplied is discussed in more detail in Annex 1 (Technical requirements_RTP_RTA). |
Hankintanimikkeistö (CPV) pää | Miscellaneous general and special-purpose machinery (42900000) |
Hankintanimikkeistö (CPV) muut | |
Aluekoodi | FI1 |
Pääasiallinen suorituspaikka |