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Hankkija

Vastaanotettu Hilmaan2023-06-27
Ilmoituksen numero2023-131995
TED numero2023/S 147-469507
OstajaorganisaatioTeknologian tutkimuskeskus VTT Oy (2647375-4 )
PL 1000, VTT
FI-02044 Espoo
http://www.vttresearch.com/fi
Hankinnan otsikkotiedotPlasma ALD batch deposition tool services
Hankinnan yhteenlaskettu kokonaisarvo koko ajalle (ilman alv:ta) arvio
Hankinnan yhteenlaskettu kokonaisarvo koko ajalle (ilman alv:ta) lopullinen
Alkuperäinen ilmoitushttps://www.hankintailmoitukset.fi/fi/public/procurement/90304/notice/131995/overview
Originaali JSON tietue131995.json

Ostettava

Hankinnan lyhyt kuvausAn unambiguous statement of the reason for direct purchase - the Act on Public Contracts 40 §, article 2: “only a certain supplier can implement the procurement for a technical reason, or for a reason related to protecting an exclusive right; it shall be a further condition that there are no reasonable alternatives or substitute solutions, and that the absence of competition is not due to an artificial narrowing of the terms and conditions of the procurement”;ALD (atomic layer deposition) technology is crucial in cleanroom processing in MEMS. Picosun Oy has been VTT’s tenant for several years by renting space from VTT cleanroom for its equipment, for example to run a demo ALD tool. Picosun gives VTT the right to use ALD so that VTT’s own personnel can operate Picosun equipment. Processing of MEMS and other devices on silicon wafers is very sensitive and takes place in a controlled cleanroom environment, where the wafers must be handled and processed by qualified operators/researchers. Using an external fab for processing would mean shipping partly processed wafers after some process steps to another facility and then back to continue the processing with VTT’s own equipment. This poses risks to induce particles or other contamination during external processing or during transport, and to damage the wafers during transportation. It is not possible to have other ALD manufacturers to provide their demo equipment into VTT’s Micronova facility, because VTT’s cleanroom is full and VTT cannot rent it to out to new companies.
Hankintanimikkeistö (CPV) pää
Hankintanimikkeistö (CPV) muut
AluekoodiFI1, FI1B1
Pääasiallinen suorituspaikka

Sopimukset

Päätös päivämäärä2023-06-28
Sopimusnumero2023-131995-001-001
MyyjätPicosun Oy (FI),  1105581-6