| Hankinnan lyhyt kuvaus | The object of the information request is Atomic Force Microscope (later “AFM”). VTT is preparing the procurement of a new AFM in VTT's microelectronics cleanroom located in Espoo Finland (VTT Micronova). AFM and its associated analyses modes are essential methods in R&D, but are widely used for quality control. In VTT the userbase is also extremely varied and therefore, the AFM needs to be very flexible, easy-to-use, and automated fulfilling research requirements (small specimen and chips) combined with full 200-mm wafer quality control features for novice to expert users. Key features and expected performance metrics: Specimen size up to 200-mm wafer size • Fully addressable stage (without needing rotation) for 200 mm wafer size specimens and for smaller specimens with a height of up to 20 mm Measuring modes typical and advanced modes • Contact mode AFM • Tapping (intermittent soft dynamic, or AC) mode AFM/Non-contact mode AFM • Lateral Force Microscopy (LFM) • Phase Imaging • Force Distance (F-D) Spectroscopy • Force volume Mapping • Magnetic Force Microscopy(MFM) • Force Modulation Microscopy(FMM) • Electric Force Microscopy (EFM) • Piezoresponse Force Microscopy (PFM) • Kelvin Probe Microscopy (KPFM) • Conductive AFM (cAFM) • Scanning Capacitance Microscopy (SCM) Scanner capabilities • XY scanner operated in closed-loop • Z scanner operated in both open-loop and closed-loop • XY scanner scan range of at least 100 μm • The scanning probe microscope software must use at least 20-bit digital-to-analog converters (DACs) in order to generate the XY and Z piezo scan signals • XY scanner are position sensored • XY scanner scan position control resolution of 0.1 nm or better • XY scanner position detector noise of less than 0.15nm, rms • XY scanner linearity error of less than 0.5% on each axis • Z scan range of at least 12 μm • Z scanner position is sensored • Z scanner topography noise of less than 0.03 nm (rms) • The linearity error of the Z scanner position detector lower than 2% Automation and motorization • Automatic and motorized laser positioning and detector adjustment controllable in the AFM software with software functions allowing automated measurements from tip insertion onwards for novice users without intervention Software • Including software for data analysis and measurement with continued demonstrated development and support for tool lifetime and facility of migration during computer upgrades • Software is user modifiable with access to source code to expand on software limited functionality without artificial restrictions Stability • Demonstrated stability on the scale of hours using photothermal cantilever excitation Other features and ease of use • Simple cantilever probe exchange, including 3rd party probes • Inclusion of an acoustic enclosure • Turn-key solution from the supplier • Capability to reach atomic resolution |
