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Hankkija
| Vastaanotettu Hilmaan | 2023-02-24 |
| Ilmoituksen numero | 2023-121318 |
| TED numero | 2023/S 043-126379 |
| Ostajaorganisaatio | VTT Technical Research Centre of Finland Ltd (2647375-4 ) P.O. Box 1000, VTT FI-02044 Espoo https://www.vttresearch.com/en |
| Hankinnan otsikkotiedot | i-line STEPPER for nanofabrication processes |
| Hankinnan yhteenlaskettu kokonaisarvo koko ajalle (ilman alv:ta) arvio | |
| Hankinnan yhteenlaskettu kokonaisarvo koko ajalle (ilman alv:ta) lopullinen | |
| Alkuperäinen ilmoitus | https://www.hankintailmoitukset.fi/en/public/procurement/83442/notice/121318/overview |
| Originaali JSON tietue | 121318.json |
Ostettava
| Hankinnan lyhyt kuvaus | VTT is looking to acquire a new or a pre-owned projection exposure system for photolithographic processes in the i-line bandwidth. This exposure system will be further called wafer “stepper”. The system of interest has the lens with property of image reduction in ratio of 1:5 or 1:4. The stepper has to be fully automated and capable of processing 150mm and 200mm ø substrates. The type of wafers the tool should be able to process are described further. The tool should be of cleanliness class 1 of the SEMI standard. The supplier will take in consideration the environmental conditions of the tool installation location and will work together on to reduce the external impact on quality output. Possible floor vibrations to be constrained by common efforts. For a pre-owned equipment, the age should be less than 10 years old. VTT will accept a pre-owned system only from the original equipment manufacturer. The tool must comply with the cleanroom equipment standard health, safety and environmental requirements. More technical details are described in separate sections of this specification. The pricing of the equipment will consist of the main price for the tool minimum requirements (“total price of the equipment”) and a separate price for the optional parts, features and efforts. The optional goods offered are not included in the total price of the equipment. All parts and accessories necessary for the exposure of 200 mm wafers must be included in the delivery and the main price. More technical details and specification of the equipment to be supplied is discussed in Annex 1. The objective is to find one professional supplier who can supply Equipment and installation and user training in its entirety. VTT Technical Research Centre of Finland Ltd will choose one supplier from among the tenderers. The objective is for the equipment to be supplied by February 2025 at the latest. |
| Hankintanimikkeistö (CPV) pää | Industrial machinery (42000000) |
| Hankintanimikkeistö (CPV) muut | |
| Aluekoodi | FI1 |
| Pääasiallinen suorituspaikka |
