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Hankkija

Vastaanotettu Hilmaan2022-06-16
Ilmoituksen numero2022-103697
TED numero2022/S 118-332490
OstajaorganisaatioVTT Technical Research Centre of Finland Ltd (2647375-4 )
P.O. Box 1000, VTT
FI-02044 Espoo
https://www.vttresearch.com/en
Hankinnan otsikkotiedotOXIDATION, SINTERING, AND ANNEALING FURNACES
Hankinnan yhteenlaskettu kokonaisarvo koko ajalle (ilman alv:ta) arvio
Hankinnan yhteenlaskettu kokonaisarvo koko ajalle (ilman alv:ta) lopullinen
Alkuperäinen ilmoitushttps://www.hankintailmoitukset.fi/en/public/procurement/72446/notice/103697/overview
Originaali JSON tietue103697.json

Ostettava

Hankinnan lyhyt kuvausThe object of the procurement is an Atmospheric Oxidation, Sintering, Annealing furnace stack (4 tubes) for the VTT Micronova cleanroom front end (later “equipment”) will be installed in the Micronova facility in Espoo, which is jointly used by VTT Technical Research Centre of Finland Ltd (VTT) and Aalto University for research, development and small-volume production of semiconductor devices. The cleanroom classification is ISO 4…ISO 6 (10…1000). The total area of the cleanroom is 2 600 m2, and there is an installed equipment base of 200 processing and measurement tools. The current main wafer size is 150 mm, but the equipment will gradually be renewed or upgraded, in order to facilitate a full process capability on 200 mm wafers by the end of the year 2024. Mainly silicon and quartz wafers are processed in the fab. The object of the tender process is described in more detail in the invitation to tender documents.
Hankintanimikkeistö (CPV) pääIndustrial or laboratory furnaces, incinerators and ovens (42300000)
Hankintanimikkeistö (CPV) muut
AluekoodiFI
Pääasiallinen suorituspaikka

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