{ "id": 60292, "procurementProjectId": 44927, "noticeNumber": "2020-060292", "reducedTimeLimitsForReceiptOfTenders": false, "corrigendumAdditionalInformation": [], "type": 100, "legalBasis": "32014L0024", "project": { "id": 44927, "title": "Market survey: LPCVD LTO\/PSG furnace for VTT Micronova cleanroom front end", "contractType": 1, "procurementCategory": 1, "referenceNumber": "", "jointProcurement": false, "procurementLaw": [], "centralPurchasing": false, "coPurchasers": [], "creatorId": "acce0ea7-4377-472a-9f6c-c73166811adc", "validationState": 2, "organisation": { "id": "a288247c-6472-42a2-2d79-08d78deb351a", "information": { "officialName": "VTT Technical Research Centre of Finland Ltd", "nationalRegistrationNumber": "2647375-4", "department": "", "nutsCodes": [ "FI" ], "postalAddress": { "streetAddress": "P.O. Box 1000, VTT", "postalCode": "02044", "town": "Espoo", "country": "FI" }, "telephoneNumber": "+358 20722111", "email": "[email protected]", "mainUrl": "https:\/\/www.vttresearch.com\/en", "validationState": 0 }, "contractingAuthorityType": 16, "otherContractingAuthorityType": "", "contractingType": 0, "mainActivity": 1024, "otherMainActivity": "Research and development", "mainActivityUtilities": 0, "validationState": 2 }, "state": 0, "defenceWorks": 0, "defenceSupplies": 0, "defenceCategory": {}, "disagreeToPublishNoticeBasedOnDefenceServiceCategory4": false, "publish": 1, "agricultureWorks": 0, "isPrivate": false, "isConcluded": false, "dateCreated": "2020-12-11T12:56:15.550021", "dateModified": "2020-12-11T12:56:15.550021" }, "lotsInfo": { "divisionLots": false, "lotsSubmittedFor": 0, "lotsSubmittedForQuantity": 0, "lotsMaxAwarded": false, "lotsMaxAwardedQuantity": 0, "lotCombinationPossible": false, "lotCombinationPossibleDescription": [], "validationState": 2 }, "objectDescriptions": [ { "mainCpvCode": { "code": "", "name": "", "vocCodes": [] }, "quantityOrScope": [], "additionalCpvCodes": [], "nutsCodes": [ "FI1B1" ], "mainsiteplaceWorksDelivery": [], "descrProcurement": [ "The object of this information request is LPCVD LTO\/PSG furnace. VTT is preparing the procurement of a new LTO PSG LPCVD furnace in VTT's microelectronics cleanroom located in Espoo Finland ((https:\/\/www.vttmemsfab.fi). ", "", "With this market survey, VTT is searching for potential suppliers and equipment available to get additional information on suppliers capable of delivering the equipment described in this information request.", "", "The LTO\/PSG furnace must be able to process thin films for the fabrication of optically and electrically active devices at the front end. The LTO\/PSG films will be used in silicon photonics devices, radiation detectors, and MEMS sensors, which are the main product lines in the fab. The required properties are low and controllable particle level, small footprint. ", "", "Some key features:", "", "\u2022\tWafer size up to 200-mm", "", "\u2022\tProcess wafers in one run must be at least 40 wafers", "", "\u2022\tLTO and PSG process:", "o\tto process Low-Temperature Oxide", "o\tto process PSG (phospho-silicate glass) ", "o\tProcess temperature of 425\u00b0C", "", "\u2022\tGas requirements", "o\tGas available at VTT is 100% concentration of SiH4", "o\tSilane (SiH4)", "o\tPhosphine (1% PH3 in N2)", "o\tNitrogen (N2)", "o\tOxygen (O2)", "", "\u2022\tSoftware:", "o\tThe software must be compatible with Windows 10.", "", "\u2022\tOperating system:", "o\tOperating system must be Windows 10, Linux or Unix", "", "\u2022\tQuartz Ware:", "o\tThe equipment must include two (2) sets of boats for \u00d8 200 mm wafer processing. One (1) boat for LTO, one (1) PSG. ", "o The equipment must include two (2) sets of boats for \u00d8 150 mm wafer processing. One (1) boat for LTO, one (1) for PSG.", "", "\u2022\tCleanliness:", "o\tISO 4", "", "\u2022\tPossible extra features:", "o\tAuto Wafer loading", "", "With this information request, VTT inquires your opinion about the following:", "-\tYour capability to sell the equipment described above,", "-\tDescription of the equipment,", "-\tDelivery time,", "-\tPricing model." ], "disagreeAwardCriteriaToBePublished": false, "awardCriteria": { "criterionTypes": 0, "qualityCriteria": [], "costCriteria": [], "priceCriterion": {}, "criterion": [ "" ], "criteriaStatedInProcurementDocuments": false }, "estimatedValue": { "type": 0, "currency": "EUR", "disagreeToBePublished": false, "doesNotExceedNationalThreshold": false }, "timeFrame": { "type": 0, "canBeRenewed": false, "renewalDescription": [] }, "candidateNumberRestrictions": { "envisagedNumber": 0, "envisagedMinimumNumber": 0, "envisagedMaximumNumber": 0, "objectiveCriteriaForChoosing": [], "selected": 0 }, "optionsAndVariants": { "variantsWillBeAccepted": false, "partialOffersWillBeAccepted": false, "options": false, "optionsDescription": [], "optionType": 0 }, "tendersMustBePresentedAsElectronicCatalogs": false, "euFunds": { "procurementRelatedToEuProgram": false, "projectIdentification": [] }, "additionalInformation": [ "In case you are a supplier of the equipment described in this information request, please send your answer with the requested information by e-mail to Mikko J\u00e4rvi, [email protected] by 12:00 (Finnish time) 7 January 2021.", "", "VTT will make a decision about the possible competitive bidding process after this survey is completed." ], "awardContract": { "contractAwarded": 0, "noAwardedContract": { "failureReason": 0, "originalNoticeSentVia": 0, "originalEsender": { "login": "", "customerLogin": "", "tedNoDocExt": "" }, "originalNoticeSentViaOther": "" }, "awardedContract": { "contractNumber": "", "contractTitle": "", "numberOfTenders": { "disagreeTenderInformationToBePublished": false, "total": 0 }, "disagreeContractorInformationToBePublished": false, "contractors": [], "initialEstimatedValueOfContract": { "currency": "" }, "finalTotalValue": { "type": 0, "currency": "", "disagreeToBePublished": false, "doesNotExceedNationalThreshold": false }, "likelyToBeSubcontracted": false, "valueOfSubcontract": { "currency": "" }, "subcontractingDescription": [], "exAnteSubcontracting": { "allOrCertainSubcontractsWillBeAwarded": false, "shareOfContractWillBeSubcontracted": false }, "pricePaidForBargainPurchases": { "currency": "" }, "notPublicFields": { "communityOrigin": false, "nonCommunityOrigin": false, "countries": [], "awardedToTendererWithVariant": false, "abnormallyLowTendersExcluded": false }, "concessionRevenue": { "currency": "" }, "pricesAndPayments": { "currency": "" }, "concessionValueAdditionalInformation": [] } }, "qualificationSystemDuration": { "type": 0, "renewal": false, "necessaryFormalities": [] }, "validationState": 2 } ], "communicationInformation": { "procurementDocumentsAvailable": 0, "procurementDocumentsUrl": "", "additionalInformation": 1, "additionalInformationAddress": { "nutsCodes": [], "postalAddress": {}, "validationState": 0 }, "otherAddressForProcurementDocuments": { "officialName": "", "nationalRegistrationNumber": "", "department": "", "nutsCodes": [], "postalAddress": { "streetAddress": "", "postalCode": "", "town": "", "country": "" }, "telephoneNumber": "", "email": "", "contactPerson": "", "mainUrl": "", "validationState": 0 }, "sendTendersOption": 0, "addressToSendTenders": { "nutsCodes": [], "postalAddress": {}, "validationState": 0 }, "electronicCommunicationRequiresSpecialTools": false, "electronicCommunicationInfoUrl": "", "documentsEntirelyInHilma": false, "specsAndAdditionalDocuments": 0, "specsAndAdditionalDocumentsAddress": { "nutsCodes": [], "postalAddress": {}, "validationState": 0 }, "electronicAccess": "", "validationState": 2 }, "contactPerson": { "name": "", "email": "[email protected]", "phone": "" }, "procurementObject": { "shortDescription": [ "The object of this information request is LPCVD LTO\/PSG furnace. VTT is preparing the procurement of a new LTO PSG LPCVD furnace in VTT's microelectronics cleanroom located in Espoo Finland (https:\/\/www.vttmemsfab.fi). " ], "estimatedValue": { "type": 0, "currency": "EUR", "disagreeToBePublished": false, "doesNotExceedNationalThreshold": false }, "estimatedValueCalculationMethod": [], "mainCpvCode": { "code": "42300000", "name": "Teollisuus- tai laboratoriouunit, polttouunit ja muut uunit", "vocCodes": [ { "code": "FG11", "name": "Tieteellisiin tarkoituksiin" } ] }, "totalValue": { "type": 0, "currency": "", "disagreeToBePublished": false, "doesNotExceedNationalThreshold": false }, "defence": { "mainsiteplaceWorksDelivery": [], "nutsCodes": [], "frameworkAgreement": { "includesFrameworkAgreement": false, "includesConclusionOfFrameworkAgreement": false, "frameworkAgreementType": 0, "frameworkEnvisagedType": 0, "includesDynamicPurchasingSystem": false, "dynamicPurchasingSystemInvolvesAdditionalPurchasers": false, "justificationForDurationOverFourYears": [], "justificationForDurationOverSevenYears": [], "justificationForDurationOverEightYears": [], "dynamicPurchasingSystemWasTerminated": false, "estimatedTotalValue": { "type": 0, "currency": "", "disagreeToBePublished": false, "doesNotExceedNationalThreshold": false }, "duration": { "type": 0, "canBeRenewed": false, "renewalDescription": [] }, "frequencyAndValue": [] }, "additionalCpvCodes": [], "subcontract": { "tendererHasToIndicateShare": false, "tendererHasToIndicateChange": false, "caMayOblige": false, "successfulTenderer": false, "successfulTendererToSpecify": false }, "optionsAndVariants": { "variantsWillBeAccepted": false, "partialOffersWillBeAccepted": false, "options": false, "optionsDescription": [], "optionType": 0 }, "totalQuantityOrScope": { "type": 0, "currency": "", "disagreeToBePublished": false, "doesNotExceedNationalThreshold": false }, "totalQuantity": [], "renewals": { "canBeRenewed": false, "amount": { "type": 0 }, "subsequentContract": { "type": 0, "canBeRenewed": false, "renewalDescription": [] } }, "timeFrame": { "type": 0, "canBeRenewed": false, "renewalDescription": [] }, "additionalInformation": [] }, "validationState": 2 }, "conditionsInformation": { "professionalSuitabilityRequirements": [], "economicCriteriaToParticipate": false, "economicCriteriaDescription": [], "economicRequiredStandards": [], "technicalCriteriaToParticipate": false, "technicalCriteriaDescription": [], "technicalRequiredStandards": [], "rulesForParticipation": [], "restrictedToShelteredWorkshop": false, "restrictedToShelteredProgram": false, "reservedOrganisationServiceMission": false, "depositsRequired": [], "financingConditions": [], "legalFormTaken": [], "qualificationSystemConditions": [], "ciriteriaForTheSelectionOfParticipants": [], "executionOfServiceIsReservedForProfession": false, "referenceToRelevantLawRegulationOrProvision": [], "participationIsReservedForProfession": false, "indicateProfession": [], "contractPerformanceConditions": [], "obligationToIndicateNamesAndProfessionalQualifications": false, "validationState": 0 }, "conditionsInformationDefence": { "depositsRequired": [], "financingConditions": [], "legalFormTaken": [], "otherParticularConditions": [], "personalSituationOfEconomicOperators": [], "personalSituationOfSubcontractors": [], "economicCriteriaOfEconomicOperators": [], "economicCriteriaOfEconomicOperatorsMinimum": [], "economicCriteriaOfSubcontractors": [], "economicCriteriaOfSubcontractorsMinimum": [], "technicalCriteriaOfEconomicOperators": [], "technicalCriteriaOfEconomicOperatorsMinimum": [], "technicalCriteriaOfSubcontractors": [], "technicalCriteriaOfSubcontractorsMinimum": [], "restrictedToShelteredWorkshops": false, "restrictedToShelteredProgrammes": false, "restrictedToParticularProfession": false, "restrictedToParticularProfessionLaw": [], "staffResponsibleForExecution": false, "validationState": 0 }, "conditionsInformationNational": { "participantSuitabilityCriteria": [], "requiredCertifications": [], "additionalInformation": [], "validationState": 0, "reservedForShelteredWorkshopOrProgram": false }, "complementaryInformation": { "isRecurringProcurement": false, "estimatedTimingForFurtherNoticePublish": [], "electronicOrderingUsed": false, "electronicInvoicingUsed": false, "electronicPaymentUsed": false, "additionalInformation": [], "defence": { "euFunds": { "procurementRelatedToEuProgram": false, "projectIdentification": [] }, "taxLegislationUrl": "", "taxLegislationInfoProvided": false, "taxLegislation": { "officialName": "", "nationalRegistrationNumber": "", "department": "", "nutsCodes": [], "postalAddress": { "streetAddress": "", "postalCode": "", "town": "", "country": "" }, "telephoneNumber": "", "email": "", "contactPerson": "", "mainUrl": "", "validationState": 0 }, "environmentalProtectionUrl": "", "environmentalProtectionInfoProvided": false, "environmentalProtection": { "officialName": "", "nationalRegistrationNumber": "", "department": "", "nutsCodes": [], "postalAddress": { "streetAddress": "", "postalCode": "", "town": "", "country": "" }, "telephoneNumber": "", "email": "", "contactPerson": "", "mainUrl": "", "validationState": 0 }, "employmentProtectionUrl": "", "employmentProtectionInfoProvided": false, "employmentProtection": { "officialName": "", "nationalRegistrationNumber": "", "department": "", "nutsCodes": [], "postalAddress": { "streetAddress": "", "postalCode": "", "town": "", "country": "" }, "telephoneNumber": "", "email": "", "contactPerson": "", "mainUrl": "", "validationState": 0 } }, "validationState": 2 }, "datePublished": "2020-12-16T12:05:04.0562435", "state": 2, "tedPublishState": 4, "tedSubmissionId": "20201214-006242", "tedPublishRequestSentDate": "2020-12-14T12:02:03", "tedPublicationInfo": { "ojs_number": "247", "no_doc_ojs": "2020\/S 247-610421", "publication_date": "2020-12-18T08:00:00", "ted_links": { "en": "http:\/\/ted.europa.eu\/udl?uri=TED:NOTICE:610421-2020:TEXT:EN:HTML" } }, "tedValidationErrors": [ { "type": "TECH", "items": [ { "name": "T001", "valid": true, "message": "XML file is valid against XSD." }, { "name": "T002", "valid": true, "message": "Metadata could be retrieved from the XML file." }, { "name": "T003", "valid": true, "message": "Unique key is active." } ] }, { "type": "VALIDATION_RULES", "items": [] } ], "noticeOjsNumber": "2020\/S 247-610421", "previousNoticeOjsNumber": "", "procedureInformation": { "procedureType": 0, "acceleratedProcedure": false, "justificationForAcceleratedProcedure": [], "contestType": 0, "contestParticipants": { "type": 0, "currency": "", "disagreeToBePublished": false, "doesNotExceedNationalThreshold": false }, "frameworkAgreement": { "includesFrameworkAgreement": false, "includesConclusionOfFrameworkAgreement": false, "frameworkAgreementType": 0, "frameworkEnvisagedType": 0, "includesDynamicPurchasingSystem": false, "dynamicPurchasingSystemInvolvesAdditionalPurchasers": false, "justificationForDurationOverFourYears": [], "justificationForDurationOverSevenYears": [], "justificationForDurationOverEightYears": [], "dynamicPurchasingSystemWasTerminated": false, "estimatedTotalValue": { "type": 0, "currency": "", "disagreeToBePublished": false, "doesNotExceedNationalThreshold": false }, "duration": { "type": 0, "canBeRenewed": false, "renewalDescription": [] }, "frequencyAndValue": [] }, "reductionRecourseToReduceNumberOfSolutions": false, "reserveRightToAwardWithoutNegotiations": false, "electronicAuctionWillBeUsed": false, "additionalInformationAboutElectronicAuction": [], "namesOfParticipantsAlreadySelected": [], "procurementGovernedByGPA": true, "criteriaForEvaluationOfProjects": [], "disagreeCriteriaForEvaluationOfProjectsPublish": false, "urlNationalProcedure": "", "mainFeaturesAward": [], "defence": { "candidateNumberRestrictions": { "envisagedNumber": 0, "envisagedMinimumNumber": 0, "envisagedMaximumNumber": 0, "objectiveCriteriaForChoosing": [], "selected": 0 }, "awardCriteria": { "criterionTypes": 0, "economicCriteriaTypes": 0, "criteria": [] } }, "national": { "otherProcedure": [], "additionalProcedureInformation": [], "transparencyType": 0, "limitedNumberOfParticipants": false, "numberOfParticipants": 0, "selectionCriteria": [] }, "validationState": 2 }, "tenderingInformation": { "tendersOrRequestsToParticipateDueDateTime": "2021-01-07T12:00:00", "languages": [], "tendersMustBeValidOption": 0, "estimatedDateOfContractNoticePublication": "2021-01-18T00:00:00", "tenderOpeningConditions": { "place": [], "informationAboutAuthorisedPersons": [] }, "defence": { "previousPublicationExists": false, "previousPriorInformationNoticeOjsNumber": { "number": "" }, "hasPreviousContractNoticeOjsNumber": false, "previousContractNoticeOjsNumber": { "number": "" }, "hasPreviousExAnteOjsNumber": false, "previousExAnteOjsNumber": { "number": "" }, "payableDocuments": false, "documentPrice": { "currency": "" }, "paymentTermsAndMethods": [], "languageType": 0, "languages": [], "otherLanguage": false, "otherLanguages": "" }, "estimatedExecutionTimeFrame": { "type": 0, "canBeRenewed": false, "renewalDescription": [] }, "validationState": 2 }, "rewardsAndJury": { "prizeAwarded": false, "numberAndValueOfPrizes": [], "detailsOfPayments": [], "serviceContractAwardedToWinner": false, "decisionOfTheJuryIsBinding": false, "namesOfSelectedMembersOfJury": [], "validationState": 0 }, "resultsOfContest": { "contestWasTerminated": false, "noPrizeType": 0, "originalNoticeSentVia": 0, "originalEsender": { "login": "", "customerLogin": "", "tedNoDocExt": "" }, "originalNoticeSentViaOther": "", "participantsContemplated": 0, "participantsSme": 0, "participantsForeign": 0, "disagreeParticipantCountPublish": false, "winners": [], "disagreeWinnersPublish": false, "valueOfPrize": { "currency": "" }, "disagreeValuePublish": false, "validationState": 0 }, "tedNoDocExt": "2020-060292", "attachments": [], "hasAttachments": false, "changes": [], "isCorrigendum": false, "isMigrated": false, "isCancelled": false, "cancelledReason": [], "isLatest": true, "language": "EN", "proceduresForReview": { "reviewBody": { "officialName": "Markkinaoikeus", "nationalRegistrationNumber": "", "department": "", "nutsCodes": [], "postalAddress": { "streetAddress": "Radanrakentajantie 5", "postalCode": "00520", "town": "Helsinki", "country": "FI" }, "telephoneNumber": "+358 295643300", "email": "[email protected]", "contactPerson": "", "mainUrl": "http:\/\/www.oikeus.fi\/markkinaoikeus", "validationState": 0 }, "reviewProcedure": [], "validationState": 0 }, "attachmentInformation": { "description": [], "links": [], "validationState": 2 }, "modifications": { "mainCpvCode": { "code": "", "name": "", "vocCodes": [] }, "additionalCpvCodes": [], "nutsCodes": [], "mainsiteplaceWorksDelivery": [], "descrProcurement": [], "timeFrame": { "type": 0, "canBeRenewed": false, "renewalDescription": [] }, "justificationForDurationOverFourYears": [], "justificationForDurationOverEightYears": [], "totalValue": { "currency": "" }, "awardedToGroupOfEconomicOperators": false, "contractors": [], "description": [], "reason": 0, "reasonDescriptionEconomic": [], "reasonDescriptionCircumstances": [], "increaseBeforeModifications": { "currency": "" }, "increaseAfterModifications": { "currency": "" }, "validationState": 0 }, "contractAwardsDefence": [], "hilmaStatistics": { "energyEfficiencyConsidered": false, "innovationConsidered": false, "smeParticipationConsidered": false, "validationState": 0 }, "annexes": { "d1": { "noTenders": false, "procedureType": 0, "suppliesManufacturedForResearch": false, "providedByOnlyParticularOperator": false, "reasonForNoCompetition": 0, "extremeUrgency": false, "additionalDeliveries": false, "repetitionExisting": false, "designContestAward": false, "commodityMarket": false, "advantageousTerms": false, "advantageousPurchaseReason": 0, "justification": [] }, "d2": { "noTenders": false, "pureResearch": false, "providedByOnlyParticularOperator": false, "reasonForNoCompetition": 0, "extremeUrgency": false, "additionalDeliveries": false, "repetitionExisting": false, "designContestAward": false, "commodityMarket": false, "advantageousTerms": false, "advantageousPurchaseReason": 0, "bargainPurchase": false, "justification": [] }, "d3": { "noTenders": false, "procedureType": 0, "otherServices": false, "productsManufacturedForResearch": false, "allTenders": false, "providedByOnlyParticularOperator": false, "reasonForNoCompetition": 0, "crisisUrgency": false, "extremeUrgency": false, "additionalDeliveries": false, "repetitionExisting": false, "commodityMarket": false, "advantageousTerms": false, "advantageousPurchaseReason": 0, "maritimeService": false, "otherJustification": 0, "justification": [] }, "d4": { "noTenders": false, "providedByOnlyParticularOperator": false, "reasonForNoCompetition": 0, "justification": [] }, "directNational": { "purchaseType": 0, "justification": [] } }, "isPrivateSmallValueProcurement": false, "dateCreated": "2020-12-11T12:56:15.9143986", "dateModified": "2020-12-18T08:00:12.0182316" }