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VTT is preparing the procurement of a new SEM in VTT's microelectronics cleanroom located in Espoo Finland ((https:\/\/www.vttmemsfab.fi). ", "With this market survey, VTT is searching potential suppliers and equipment available to get additional information on suppliers capable of delivering the equipment described in this information request.", "SEM and Energy-Dispersive X-ray Spectroscopy (later \u201cEDX\u201d) analysis are essential methods in both R&D and manufacturing quality control. Therefore, the SEM needs to be very flexible, fulfilling research requirements (small specimen, chips, and cross sections) combined with full 200-mm wafer quality control features. 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