{
"id": 128903,
"procurementProjectId": 88362,
"noticeNumber": "2023-128903",
"reducedTimeLimitsForReceiptOfTenders": false,
"corrigendumAdditionalInformation": [],
"creatorSystem": "Cloudia Kilpailutus",
"type": 200,
"legalBasis": "32014L0024",
"project": {
"id": 88362,
"title": "Si & Silicon oxide CMP",
"contractType": 1,
"procurementCategory": 1,
"referenceNumber": "Reg. no 32\/206\/2023",
"jointProcurement": false,
"procurementLaw": [],
"centralPurchasing": false,
"coPurchasers": [],
"validationState": 0,
"organisation": {
"id": "a288247c-6472-42a2-2d79-08d78deb351a",
"information": {
"officialName": "VTT Technical Research Centre of Finland Ltd",
"nationalRegistrationNumber": "2647375-4",
"nutsCodes": [
"FI1"
],
"postalAddress": {
"streetAddress": "P.O. Box 1000, VTT",
"postalCode": "02044",
"town": "Espoo",
"country": "FI"
},
"telephoneNumber": "+358 20722111",
"email": "[email protected]",
"mainUrl": "https:\/\/www.vttresearch.com\/en",
"validationState": 0
},
"contractingAuthorityType": 16,
"contractingType": 0,
"mainActivity": 1024,
"otherMainActivity": "Research and development",
"mainActivityUtilities": 0,
"validationState": 0,
"dataSource": 0,
"identifierMissing": false,
"vhsStatus": 0
},
"state": 1,
"defenceWorks": 0,
"defenceSupplies": 0,
"publish": 1,
"agricultureWorks": 0,
"isPrivate": false,
"isConcluded": false,
"tendering": 0
},
"lotsInfo": {
"divisionLots": false,
"lotsSubmittedFor": 0,
"lotsSubmittedForQuantity": 0,
"lotsMaxAwarded": false,
"lotsMaxAwardedQuantity": 0,
"lotCombinationPossible": false,
"lotCombinationPossibleDescription": [],
"validationState": 0
},
"objectDescriptions": [
{
"mainCpvCode": {
"code": "42900000",
"name": "Miscellaneous general and special-purpose machinery",
"vocCodes": []
},
"quantityOrScope": [],
"additionalCpvCodes": [],
"vehicles": {
"containsVehiclesInCertainCategories": false,
"containsOtherThanExcludedVehicles": false,
"lightPersonalAndCommercialVehicles": {
"numberOfCleanVehicles": 0,
"totalNumberOfVehicles": 0
},
"trucksAboveThreeAndHalfTons": {
"numberOfCleanVehicles": 0,
"totalNumberOfVehicles": 0
},
"busesWithNotAllPassengersSeated": {
"numberOfCleanVehicles": 0,
"totalNumberOfVehicles": 0
}
},
"nutsCodes": [
"FI1B"
],
"mainsiteplaceWorksDelivery": [],
"descrProcurement": [
"The object of the tender is an Automatic Chemical Mechanical Polisher (later also \u201cEquipment\u201d), for the polishing of typical films and substrates like Si, Si-compounds, Ge and other typical wafers used in semiconductor industry of 100, 150 and 200mm diameter. The equipment shall be designed with at least two polishing platens with integrated in-situ capable pad conditioning systems, an end-point detection on at least one platen, multi-zone carrier heads for all wafer diameters and a slurry feed system for at least 3 slurries. In addition, a supporting wafer cleaning system either integrated or stand-alone is an optional part of the tendering procedure. ",
"",
"The tool must comply with cleanroom equipment standard safety and contamination requirements. ",
"",
"The tool specs are based on the following factors:\u202f ",
"",
"- Polish finishing quality ",
"- Wafer handling without errors and wafer loss ",
"- End-point detection for layer clearing ",
"- Achievable polishing rate profile ",
"",
"The pricing of the equipment will consist of the main price for the minimum tool requirements (\u201ctotal price of the equipment\u201d) and a separate price for the optional parts, features and efforts. The optional goods offered are not included in the total price of the equipment. ",
"",
"The object of the tender process is described in more detail in the invitation to tender documents. "
],
"disagreeAwardCriteriaToBePublished": false,
"awardCriteria": {
"criterionTypes": 5,
"qualityCriteria": [
{
"criterion": "Price",
"weighting": "100"
}
],
"costCriteria": [],
"priceCriterion": {
"weighting": "100"
},
"criterion": [],
"criteriaStatedInProcurementDocuments": false
},
"estimatedValue": {
"type": 0
},
"timeFrame": {
"type": 2,
"months": 12,
"canBeRenewed": false
},
"candidateNumberRestrictions": {
"envisagedNumber": 0,
"envisagedMinimumNumber": 0,
"envisagedMaximumNumber": 0,
"selected": 0
},
"optionsAndVariants": {
"variantsWillBeAccepted": false,
"partialOffersWillBeAccepted": false,
"options": true,
"optionsDescription": [
"The optional parts, features and efforts which are described in more detail in the invitation to tender documents:",
"",
"- Handling of 4-inch wafers (equivalent to 100mm)",
"- Automatic clear wafer processing capability including wafer handling on CMP system",
"- Standalone or integrated post CMP cleaning system with two individual dual roller PVA brush units, megasonic option and spin dry, at least 1 chemical input, and for standalone additionally: automatic cassette to cassette capability for 6 and 8 wafers with clear wafer handling capability",
"- 100mm membrane carrier with multi-zone (at least 3) pressure system for material removal profile control with additional independent pressure control on retainer ring",
"- Maintenance set for 100mm wafer carrier including at least 2 retainer rings and 3 membranes",
"- Multi zone pad conditioning system, with pressure control for secondary platen",
"- Recommended set of maintenance parts needed for smooth operation for a period of two (2) years",
"",
"Offering optional parts, features and efforts are not mandatory."
],
"optionType": 0
},
"tendersMustBePresentedAsElectronicCatalogs": false,
"euFunds": {
"procurementRelatedToEuProgram": true,
"projectIdentification": [
"The procurement Is related to project financed by EU funds (PREVAIL=Partnership for Realization and Validation of AI hardware Leadership)."
]
},
"additionalInformation": [
"Additional information regarding the section II.2.7) above: Agreement shall enter into force on the latest date of signature by the Parties and shall be in force until the Equipment has been delivered and accepted, the user training has been held and agreed payment paid, excluding clauses which legal effects are meant to survive the termination or expiration of the Agreement."
],
"awardContract": {
"contractAwarded": 0,
"noAwardedContract": {
"failureReason": 0,
"originalNoticeSentVia": 0
},
"awardedContracts": []
},
"validationState": 0
}
],
"communicationInformation": {
"procurementDocumentsAvailable": 1,
"procurementDocumentsUrl": "https:\/\/tarjouspalvelu.fi\/vtt?id=457497&tpk=1fdab13f-b9e8-4f11-9706-13824351e901",
"additionalInformation": 1,
"additionalInformationAddress": {
"officialName": "VTT Technical Research Centre of Finland Ltd",
"nationalRegistrationNumber": "2647375-4",
"nutsCodes": [
"FI1"
],
"postalAddress": {
"streetAddress": "P.O. Box 1000, VTT",
"postalCode": "02044",
"town": "Espoo",
"country": "FI"
},
"telephoneNumber": "+358 20722111",
"email": "[email protected]",
"mainUrl": "https:\/\/www.vttresearch.com\/en",
"validationState": 0
},
"otherAddressForProcurementDocuments": {
"nutsCodes": [],
"postalAddress": {},
"validationState": 0
},
"sendTendersOption": 2,
"electronicAddressToSendTenders": "https:\/\/tarjouspalvelu.fi\/vtt?id=457497&tpk=1fdab13f-b9e8-4f11-9706-13824351e901",
"addressToSendTenders": {
"officialName": "VTT Technical Research Centre of Finland Ltd",
"nationalRegistrationNumber": "2647375-4",
"nutsCodes": [
"FI1"
],
"postalAddress": {
"streetAddress": "P.O. Box 1000, VTT",
"postalCode": "02044",
"town": "Espoo",
"country": "FI"
},
"telephoneNumber": "+358 20722111",
"email": "[email protected]",
"mainUrl": "https:\/\/www.vttresearch.com\/en",
"validationState": 0
},
"electronicCommunicationRequiresSpecialTools": false,
"documentsEntirelyInHilma": false,
"specsAndAdditionalDocuments": 0,
"validationState": 0
},
"contactPerson": {
"email": "[email protected]",
"phone": "+358 20722111"
},
"procurementObject": {
"shortDescription": [
"The object of the tender is an Automatic Chemical Mechanical Polisher (later also \u201cEquipment\u201d), for the polishing of typical films and substrates like Si, Si-compounds, Ge and other typical wafers used in semiconductor industry of 100, 150 and 200mm diameter. The equipment shall be designed with at least two polishing platens with integrated in-situ capable pad conditioning systems, an end-point detection on at least one platen, multi-zone carrier heads for all wafer diameters and a slurry feed system for at least 3 slurries. In addition, a supporting wafer cleaning system either integrated or stand-alone is an optional part of the tendering procedure.",
"",
"The object of the tender process is described in more detail in the invitation to tender documents."
],
"estimatedValue": {
"type": 1,
"value": 800000,
"currency": "EUR"
},
"estimatedValueCalculationMethod": [],
"mainCpvCode": {
"code": "42900000",
"name": "Miscellaneous general and special-purpose machinery",
"vocCodes": []
},
"defence": {
"nutsCodes": [],
"frameworkAgreement": {
"includesFrameworkAgreement": false,
"includesConclusionOfFrameworkAgreement": false,
"frameworkAgreementType": 0,
"frameworkEnvisagedType": 0,
"includesDynamicPurchasingSystem": false,
"dynamicPurchasingSystemInvolvesAdditionalPurchasers": false,
"dynamicPurchasingSystemWasTerminated": false,
"estimatedTotalValue": {
"type": 0
},
"duration": {
"type": 0,
"canBeRenewed": false
}
},
"subcontract": {
"tendererHasToIndicateShare": false,
"tendererHasToIndicateChange": false,
"caMayOblige": false,
"successfulTenderer": false,
"successfulTendererToSpecify": false
},
"optionsAndVariants": {
"variantsWillBeAccepted": false,
"partialOffersWillBeAccepted": false,
"options": false,
"optionType": 0
},
"totalQuantityOrScope": {
"type": 0
},
"renewals": {
"canBeRenewed": false
},
"timeFrame": {
"type": 0,
"canBeRenewed": false
}
},
"validationState": 0
},
"conditionsInformation": {
"professionalSuitabilityRequirements": [
"As stated in the invitation to tender documents."
],
"economicCriteriaToParticipate": false,
"economicCriteriaDescription": [
"Selection criteria as stated in the invitation to tender documents"
],
"economicRequiredStandards": [],
"technicalCriteriaToParticipate": false,
"technicalCriteriaDescription": [
"Selection criteria as stated in the invitation to tender documents"
],
"technicalRequiredStandards": [],
"rulesForParticipation": [],
"restrictedToShelteredWorkshop": false,
"restrictedToShelteredProgram": false,
"reservedOrganisationServiceMission": false,
"depositsRequired": [],
"financingConditions": [],
"legalFormTaken": [],
"qualificationSystemConditions": [],
"ciriteriaForTheSelectionOfParticipants": [],
"executionOfServiceIsReservedForProfession": false,
"referenceToRelevantLawRegulationOrProvision": [],
"participationIsReservedForProfession": false,
"indicateProfession": [],
"contractPerformanceConditions": [
"As stated in the invitation to tender documents."
],
"obligationToIndicateNamesAndProfessionalQualifications": false,
"validationState": 0
},
"conditionsInformationDefence": {
"depositsRequired": [],
"financingConditions": [],
"legalFormTaken": [],
"otherParticularConditions": [],
"personalSituationOfEconomicOperators": [],
"personalSituationOfSubcontractors": [],
"economicCriteriaOfEconomicOperators": [],
"economicCriteriaOfEconomicOperatorsMinimum": [],
"economicCriteriaOfSubcontractors": [],
"economicCriteriaOfSubcontractorsMinimum": [],
"technicalCriteriaOfEconomicOperators": [],
"technicalCriteriaOfEconomicOperatorsMinimum": [],
"technicalCriteriaOfSubcontractors": [],
"technicalCriteriaOfSubcontractorsMinimum": [],
"restrictedToShelteredWorkshops": false,
"restrictedToShelteredProgrammes": false,
"restrictedToParticularProfession": false,
"restrictedToParticularProfessionLaw": [],
"staffResponsibleForExecution": false,
"validationState": 0
},
"conditionsInformationNational": {
"participantSuitabilityCriteria": [],
"requiredCertifications": [],
"additionalInformation": [],
"validationState": 0,
"reservedForShelteredWorkshopOrProgram": false
},
"complementaryInformation": {
"isRecurringProcurement": false,
"estimatedTimingForFurtherNoticePublish": [],
"electronicOrderingUsed": false,
"electronicInvoicingUsed": false,
"electronicPaymentUsed": false,
"additionalInformation": [],
"validationState": 0
},
"datePublished": "2023-05-19T12:25:06.632845",
"state": 2,
"tedPublishState": 4,
"tedSubmissionId": "20230517-006716",
"tedPublishRequestSentDate": "2023-05-17T12:22:50",
"tedPublicationInfo": {
"ojs_number": "097",
"no_doc_ojs": "2023\/S 097-303833",
"publication_date": "2023-05-22T07:00:00",
"ted_links": {
"en": "http:\/\/ted.europa.eu\/udl?uri=TED:NOTICE:303833-2023:TEXT:EN:HTML"
}
},
"tedValidationErrors": [
{
"type": "TECH",
"items": [
{
"name": "T001",
"valid": true,
"message": "XML file is valid against XSD."
},
{
"name": "T002",
"valid": true,
"message": "Metadata could be retrieved from the XML file."
},
{
"name": "T003",
"valid": true,
"message": "Unique key is active."
}
]
},
{
"type": "VALIDATION_RULES",
"items": []
}
],
"noticeOjsNumber": "2023\/S 097-303833",
"procedureInformation": {
"procedureType": 1,
"acceleratedProcedure": false,
"justificationForAcceleratedProcedure": [],
"contestType": 0,
"frameworkAgreement": {
"includesFrameworkAgreement": false,
"includesConclusionOfFrameworkAgreement": false,
"frameworkAgreementType": 0,
"frameworkEnvisagedType": 0,
"includesDynamicPurchasingSystem": false,
"dynamicPurchasingSystemInvolvesAdditionalPurchasers": false,
"dynamicPurchasingSystemWasTerminated": false,
"estimatedTotalValue": {
"type": 0
},
"duration": {
"type": 0,
"canBeRenewed": false
}
},
"reductionRecourseToReduceNumberOfSolutions": false,
"reserveRightToAwardWithoutNegotiations": false,
"electronicAuctionWillBeUsed": false,
"additionalInformationAboutElectronicAuction": [],
"namesOfParticipantsAlreadySelected": [],
"procurementGovernedByGPA": true,
"criteriaForEvaluationOfProjects": [],
"disagreeCriteriaForEvaluationOfProjectsPublish": false,
"mainFeaturesAward": [],
"validationState": 0
},
"tenderingInformation": {
"tendersOrRequestsToParticipateDueDateTime": "2023-06-19T09:00:00",
"languages": [
"EN"
],
"tendersMustBeValidOption": 2,
"tendersMustBeValidForMonths": 6,
"tenderOpeningConditions": {
"openingDateAndTime": "2023-06-19T09:10:00",
"place": [
"Espoo, Finland"
],
"informationAboutAuthorisedPersons": [
"The given date is preliminary. VTT reserves the right to change the scheduled date and time.",
"",
"The opening of tenders shall not be a public event.",
""
]
},
"defence": {
"previousPublicationExists": false,
"hasPreviousContractNoticeOjsNumber": false,
"hasPreviousExAnteOjsNumber": false,
"payableDocuments": false,
"languageType": 0,
"languages": [],
"otherLanguage": false
},
"estimatedExecutionTimeFrame": {
"type": 0,
"canBeRenewed": false
},
"validationState": 0
},
"rewardsAndJury": {
"prizeAwarded": false,
"numberAndValueOfPrizes": [],
"detailsOfPayments": [],
"serviceContractAwardedToWinner": false,
"decisionOfTheJuryIsBinding": false,
"namesOfSelectedMembersOfJury": [],
"validationState": 0
},
"resultsOfContest": {
"contestWasTerminated": false,
"noPrizeType": 0,
"originalNoticeSentVia": 0,
"participantsContemplated": 0,
"participantsSme": 0,
"participantsForeign": 0,
"disagreeParticipantCountPublish": false,
"winners": [],
"disagreeWinnersPublish": false,
"disagreeValuePublish": false,
"validationState": 0
},
"tedNoDocExt": "2023-128903",
"attachments": [],
"hasAttachments": true,
"changes": [],
"isCorrigendum": false,
"isMigrated": false,
"isCancelled": false,
"isContractAwardCancellationNotice": false,
"cancelledReason": [],
"isLatest": true,
"language": "EN",
"proceduresForReview": {
"reviewBody": {
"officialName": "Markkinaoikeus",
"nutsCodes": [],
"postalAddress": {
"streetAddress": "S\u00f6rn\u00e4istenkatu 1",
"postalCode": "00580",
"town": "Helsinki",
"country": "FI"
},
"telephoneNumber": "+358 295643300",
"email": "[email protected]",
"mainUrl": "http:\/\/www.oikeus.fi\/markkinaoikeus",
"validationState": 0
},
"reviewProcedure": [],
"validationState": 0
},
"attachmentInformation": {
"description": [],
"links": [
{
"url": "https:\/\/www.vttresearch.com\/"
}
],
"validationState": 0
},
"rtpAttachmentInformation": {
"description": [],
"links": [],
"validationState": 0
},
"pcftAttachmentInformation": {
"description": [],
"links": [],
"validationState": 0
},
"modifications": {
"additionalCpvCodes": [],
"nutsCodes": [],
"mainsiteplaceWorksDelivery": [],
"descrProcurement": [],
"timeFrame": {
"type": 0,
"canBeRenewed": false
},
"justificationForDurationOverFourYears": [],
"justificationForDurationOverEightYears": [],
"totalValue": {},
"awardedToGroupOfEconomicOperators": false,
"contractors": [],
"description": [],
"reason": 0,
"reasonDescriptionEconomic": [],
"reasonDescriptionCircumstances": [],
"increaseBeforeModifications": {},
"increaseAfterModifications": {},
"validationState": 0
},
"contractAwardsDefence": [
{
"numberOfTenders": {
"disagreeTenderInformationToBePublished": false,
"total": 0
},
"contractor": {
"nutsCodes": [],
"postalAddress": {},
"isSmallMediumEnterprise": false,
"validationState": 0
},
"estimatedValue": {},
"contractValueType": 0,
"finalTotalValue": {},
"lowestOffer": {},
"highestOffer": {},
"annualOrMonthlyValue": {
"type": 0,
"canBeRenewed": false
},
"likelyToBeSubcontracted": false,
"valueOfSubcontract": {},
"valueOfSubcontractNotKnown": false,
"subcontractingDescription": [],
"allOrCertainSubcontractsWillBeAwarded": false,
"shareOfContractWillBeSubcontracted": false,
"validationState": 0
}
],
"hilmaStatistics": {
"energyEfficiencyConsidered": false,
"lowCarbon": false,
"circularEconomy": false,
"biodiversity": false,
"sustainableFoodProduction": false,
"justWorkingConditions": true,
"employmentCondition": false,
"codeOfConduct": true,
"innovationConsidered": true,
"solutionNewToBuyer": false,
"solutionNewToMarketOrIndustry": false,
"smeParticipationConsidered": true,
"validationState": 0
},
"isPrivateSmallValueProcurement": false,
"espdRequestReferences": [],
"hilmaSubmissionDate": "2023-05-17T12:22:19.9843312",
"dateCreated": "2023-05-17T12:22:19.7060831",
"dateModified": "2023-05-22T07:00:21.5680845"
}