{
"id": 128779,
"procurementProjectId": 88279,
"noticeNumber": "2023-128779",
"reducedTimeLimitsForReceiptOfTenders": false,
"corrigendumAdditionalInformation": [],
"creatorSystem": "Cloudia Kilpailutus",
"type": 200,
"legalBasis": "32014L0024",
"project": {
"id": 88279,
"title": "Plasma ALD",
"contractType": 1,
"procurementCategory": 1,
"referenceNumber": "Reg. no 33\/206\/2023",
"jointProcurement": false,
"procurementLaw": [],
"centralPurchasing": false,
"coPurchasers": [],
"validationState": 0,
"organisation": {
"id": "a288247c-6472-42a2-2d79-08d78deb351a",
"information": {
"officialName": "VTT Technical Research Centre of Finland Ltd",
"nationalRegistrationNumber": "2647375-4",
"nutsCodes": [
"FI1"
],
"postalAddress": {
"streetAddress": "P.O. Box 1000, VTT",
"postalCode": "02044",
"town": "Espoo",
"country": "FI"
},
"telephoneNumber": "+358 20722111",
"email": "[email protected]",
"mainUrl": "https:\/\/www.vttresearch.com\/en",
"validationState": 0
},
"contractingAuthorityType": 16,
"contractingType": 0,
"mainActivity": 1024,
"otherMainActivity": "Research and development",
"mainActivityUtilities": 0,
"validationState": 0,
"dataSource": 0,
"identifierMissing": false,
"vhsStatus": 0
},
"state": 1,
"defenceWorks": 0,
"defenceSupplies": 0,
"publish": 1,
"agricultureWorks": 0,
"isPrivate": false,
"isConcluded": false,
"tendering": 0
},
"lotsInfo": {
"divisionLots": false,
"lotsSubmittedFor": 0,
"lotsSubmittedForQuantity": 0,
"lotsMaxAwarded": false,
"lotsMaxAwardedQuantity": 0,
"lotCombinationPossible": false,
"lotCombinationPossibleDescription": [],
"validationState": 0
},
"objectDescriptions": [
{
"mainCpvCode": {
"code": "42900000",
"name": "Miscellaneous general and special-purpose machinery",
"vocCodes": []
},
"quantityOrScope": [],
"additionalCpvCodes": [],
"vehicles": {
"containsVehiclesInCertainCategories": false,
"containsOtherThanExcludedVehicles": false,
"lightPersonalAndCommercialVehicles": {
"numberOfCleanVehicles": 0,
"totalNumberOfVehicles": 0
},
"trucksAboveThreeAndHalfTons": {
"numberOfCleanVehicles": 0,
"totalNumberOfVehicles": 0
},
"busesWithNotAllPassengersSeated": {
"numberOfCleanVehicles": 0,
"totalNumberOfVehicles": 0
}
},
"nutsCodes": [
"FI1B"
],
"mainsiteplaceWorksDelivery": [
"Espoo"
],
"descrProcurement": [
"The object of the tender is a 2-chamber Plasma Enhanced Atomic Layer Deposition Cluster with Automatic Wafer Handling (later also \u201cEquipment\u201d and\/or \"Tool\") for coating of 200mm wafer substrates, or substrates that can be placed on such carrier wafers, with different metals, nitrides and oxides with process separation between metals\/nitrides and oxides, and wafer handling from chamber-to-chamber and chamber-to-cassette without vacuum breaking.",
"",
"The tool must comply with technical properties and functionality, performance specifications and acceptance criteria set out in this Annex 1. The tool must also comply with the Cleanroom equipment standard safety and contamination requirements set out in Annex 2. A tender which does not meet one or more of the requirements specified in the annexes 1 and \/ or 2, may be rejected for failing to comply with the call for tenders.",
" ",
"The tool specifications are based on the following parameters or targets: ",
"",
"\u2022 Deposition uniformity",
"\u2022 Deposited film performance characteristics",
"\u2022 Substrate handling without errors and wafer loss",
"\u2022 Recipe library",
"",
"The pricing of the equipment will consist of the main price for the minimum tool requirements (\u201ctotal price of the equipment\u201d) and a separate price for the optional parts, features and efforts. The optional parts, features and efforts are not included in the total price of the equipment.",
"",
"The object of the tender process is described in more detail in the invitation to tender documents. "
],
"disagreeAwardCriteriaToBePublished": false,
"awardCriteria": {
"criterionTypes": 5,
"qualityCriteria": [
{
"criterion": "Price",
"weighting": "100"
}
],
"costCriteria": [],
"priceCriterion": {
"weighting": "100"
},
"criterion": [],
"criteriaStatedInProcurementDocuments": false
},
"estimatedValue": {
"type": 0
},
"timeFrame": {
"type": 2,
"months": 12,
"canBeRenewed": false
},
"candidateNumberRestrictions": {
"envisagedNumber": 0,
"envisagedMinimumNumber": 0,
"envisagedMaximumNumber": 0,
"selected": 0
},
"optionsAndVariants": {
"variantsWillBeAccepted": false,
"partialOffersWillBeAccepted": false,
"options": true,
"optionsDescription": [
"The contracting entity may procure the following or some of the following optional features from the contract supplier (see Annex 1):",
"",
"\u2022 Optional feature 1: gas line and in-situ production of ozone (O3) for chamber dedicated to oxides",
"\u2022 Optional feature 2 : integrated ellipsometry hardware for one chamber",
"",
"Offering optional features is not mandatory. Optional features are not taken into account in the price comparison of tenders."
],
"optionType": 0
},
"tendersMustBePresentedAsElectronicCatalogs": false,
"euFunds": {
"procurementRelatedToEuProgram": true,
"projectIdentification": [
"The procurement is related to EU_PREVAIL-project (Partnership for Realization and Validation of AI hardware Leadership) financed by EU funds."
]
},
"additionalInformation": [
"Additional information regarding the section II.2.7) above: Agreement shall enter into force on the latest date of signature by the Parties and shall be in force until the Equipment has been delivered and accepted, the user training has been held and agreed payment paid, excluding clauses which legal effects are meant to survive the termination or expiration of the Agreement.",
"",
""
],
"awardContract": {
"contractAwarded": 0,
"noAwardedContract": {
"failureReason": 0,
"originalNoticeSentVia": 0
},
"awardedContracts": []
},
"validationState": 0
}
],
"communicationInformation": {
"procurementDocumentsAvailable": 1,
"procurementDocumentsUrl": "https:\/\/tarjouspalvelu.fi\/vtt?id=458678&tpk=d983cc71-c1a2-4360-aa2c-cc0d91814ddd",
"additionalInformation": 1,
"additionalInformationAddress": {
"officialName": "VTT Technical Research Centre of Finland Ltd",
"nationalRegistrationNumber": "2647375-4",
"nutsCodes": [
"FI1"
],
"postalAddress": {
"streetAddress": "P.O. Box 1000, VTT",
"postalCode": "02044",
"town": "Espoo",
"country": "FI"
},
"telephoneNumber": "+358 20722111",
"email": "[email protected]",
"mainUrl": "https:\/\/www.vttresearch.com\/en",
"validationState": 0
},
"otherAddressForProcurementDocuments": {
"nutsCodes": [],
"postalAddress": {},
"validationState": 0
},
"sendTendersOption": 1,
"electronicAddressToSendTenders": "https:\/\/tarjouspalvelu.fi\/vtt?id=458678&tpk=d983cc71-c1a2-4360-aa2c-cc0d91814ddd",
"addressToSendTenders": {
"nutsCodes": [],
"postalAddress": {},
"validationState": 0
},
"electronicCommunicationRequiresSpecialTools": false,
"documentsEntirelyInHilma": false,
"specsAndAdditionalDocuments": 0,
"validationState": 0
},
"contactPerson": {
"email": "[email protected]",
"phone": "+358 20722111"
},
"procurementObject": {
"shortDescription": [
"The object of the tender is a 2-chamber Plasma Enhanced Atomic Layer Deposition Cluster with Automatic Wafer Handling (later also \u201cEquipment\u201d and\/or \"Tool\") for coating of 200mm wafer substrates, or substrates that can be placed on such carrier wafers, with different metals, nitrides and oxides with process separation between metals\/nitrides and oxides, and wafer handling from chamber-to-chamber and chamber-to-cassette without vacuum breaking.",
"",
"The object of the tender process is described in more detail in the invitation to tender documents."
],
"estimatedValue": {
"type": 1,
"value": 1600000,
"currency": "EUR"
},
"estimatedValueCalculationMethod": [],
"mainCpvCode": {
"code": "42900000",
"name": "Miscellaneous general and special-purpose machinery",
"vocCodes": []
},
"defence": {
"nutsCodes": [],
"frameworkAgreement": {
"includesFrameworkAgreement": false,
"includesConclusionOfFrameworkAgreement": false,
"frameworkAgreementType": 0,
"frameworkEnvisagedType": 0,
"includesDynamicPurchasingSystem": false,
"dynamicPurchasingSystemInvolvesAdditionalPurchasers": false,
"dynamicPurchasingSystemWasTerminated": false,
"estimatedTotalValue": {
"type": 0
},
"duration": {
"type": 0,
"canBeRenewed": false
}
},
"subcontract": {
"tendererHasToIndicateShare": false,
"tendererHasToIndicateChange": false,
"caMayOblige": false,
"successfulTenderer": false,
"successfulTendererToSpecify": false
},
"optionsAndVariants": {
"variantsWillBeAccepted": false,
"partialOffersWillBeAccepted": false,
"options": false,
"optionType": 0
},
"totalQuantityOrScope": {
"type": 0
},
"renewals": {
"canBeRenewed": false
},
"timeFrame": {
"type": 0,
"canBeRenewed": false
}
},
"validationState": 0
},
"conditionsInformation": {
"professionalSuitabilityRequirements": [
"As stated in the invitation to tender documents."
],
"economicCriteriaToParticipate": false,
"economicCriteriaDescription": [
"Selection criteria as stated in the invitation to tender documents"
],
"economicRequiredStandards": [],
"technicalCriteriaToParticipate": false,
"technicalCriteriaDescription": [
"Selection criteria as stated in the invitation to tender documents"
],
"technicalRequiredStandards": [],
"rulesForParticipation": [],
"restrictedToShelteredWorkshop": false,
"restrictedToShelteredProgram": false,
"reservedOrganisationServiceMission": false,
"depositsRequired": [],
"financingConditions": [],
"legalFormTaken": [],
"qualificationSystemConditions": [],
"ciriteriaForTheSelectionOfParticipants": [],
"executionOfServiceIsReservedForProfession": false,
"referenceToRelevantLawRegulationOrProvision": [],
"participationIsReservedForProfession": false,
"indicateProfession": [],
"contractPerformanceConditions": [
"As stated in the invitation to tender documents."
],
"obligationToIndicateNamesAndProfessionalQualifications": false,
"validationState": 0
},
"conditionsInformationDefence": {
"depositsRequired": [],
"financingConditions": [],
"legalFormTaken": [],
"otherParticularConditions": [],
"personalSituationOfEconomicOperators": [],
"personalSituationOfSubcontractors": [],
"economicCriteriaOfEconomicOperators": [],
"economicCriteriaOfEconomicOperatorsMinimum": [],
"economicCriteriaOfSubcontractors": [],
"economicCriteriaOfSubcontractorsMinimum": [],
"technicalCriteriaOfEconomicOperators": [],
"technicalCriteriaOfEconomicOperatorsMinimum": [],
"technicalCriteriaOfSubcontractors": [],
"technicalCriteriaOfSubcontractorsMinimum": [],
"restrictedToShelteredWorkshops": false,
"restrictedToShelteredProgrammes": false,
"restrictedToParticularProfession": false,
"restrictedToParticularProfessionLaw": [],
"staffResponsibleForExecution": false,
"validationState": 0
},
"conditionsInformationNational": {
"participantSuitabilityCriteria": [],
"requiredCertifications": [],
"additionalInformation": [],
"validationState": 0,
"reservedForShelteredWorkshopOrProgram": false
},
"complementaryInformation": {
"isRecurringProcurement": false,
"estimatedTimingForFurtherNoticePublish": [],
"electronicOrderingUsed": false,
"electronicInvoicingUsed": false,
"electronicPaymentUsed": false,
"additionalInformation": [],
"validationState": 0
},
"datePublished": "2023-05-18T13:35:16.8065827",
"state": 2,
"tedPublishState": 4,
"tedSubmissionId": "20230516-007088",
"tedPublishRequestSentDate": "2023-05-16T13:32:55",
"tedPublicationInfo": {
"ojs_number": "096",
"no_doc_ojs": "2023\/S 096-301971",
"publication_date": "2023-05-19T07:00:00",
"ted_links": {
"en": "http:\/\/ted.europa.eu\/udl?uri=TED:NOTICE:301971-2023:TEXT:EN:HTML"
}
},
"tedValidationErrors": [
{
"type": "TECH",
"items": [
{
"name": "T001",
"valid": true,
"message": "XML file is valid against XSD."
},
{
"name": "T002",
"valid": true,
"message": "Metadata could be retrieved from the XML file."
},
{
"name": "T003",
"valid": true,
"message": "Unique key is active."
}
]
},
{
"type": "VALIDATION_RULES",
"items": []
}
],
"noticeOjsNumber": "2023\/S 096-301971",
"procedureInformation": {
"procedureType": 1,
"acceleratedProcedure": false,
"justificationForAcceleratedProcedure": [],
"contestType": 0,
"frameworkAgreement": {
"includesFrameworkAgreement": false,
"includesConclusionOfFrameworkAgreement": false,
"frameworkAgreementType": 0,
"frameworkEnvisagedType": 0,
"includesDynamicPurchasingSystem": false,
"dynamicPurchasingSystemInvolvesAdditionalPurchasers": false,
"dynamicPurchasingSystemWasTerminated": false,
"estimatedTotalValue": {
"type": 0
},
"duration": {
"type": 0,
"canBeRenewed": false
}
},
"reductionRecourseToReduceNumberOfSolutions": false,
"reserveRightToAwardWithoutNegotiations": false,
"electronicAuctionWillBeUsed": false,
"additionalInformationAboutElectronicAuction": [],
"namesOfParticipantsAlreadySelected": [],
"procurementGovernedByGPA": true,
"criteriaForEvaluationOfProjects": [],
"disagreeCriteriaForEvaluationOfProjectsPublish": false,
"mainFeaturesAward": [],
"validationState": 0
},
"tenderingInformation": {
"tendersOrRequestsToParticipateDueDateTime": "2023-06-19T12:00:00",
"languages": [
"EN"
],
"tendersMustBeValidOption": 2,
"tendersMustBeValidForMonths": 6,
"tenderOpeningConditions": {
"openingDateAndTime": "2023-06-19T12:05:00",
"informationAboutAuthorisedPersons": [
"The given date is preliminary. VTT reserves the right to change the scheduled date and time.",
"",
"The opening of tenders shall not be a public event.",
""
]
},
"defence": {
"previousPublicationExists": false,
"hasPreviousContractNoticeOjsNumber": false,
"hasPreviousExAnteOjsNumber": false,
"payableDocuments": false,
"languageType": 0,
"languages": [],
"otherLanguage": false
},
"estimatedExecutionTimeFrame": {
"type": 0,
"canBeRenewed": false
},
"validationState": 0
},
"rewardsAndJury": {
"prizeAwarded": false,
"numberAndValueOfPrizes": [],
"detailsOfPayments": [],
"serviceContractAwardedToWinner": false,
"decisionOfTheJuryIsBinding": false,
"namesOfSelectedMembersOfJury": [],
"validationState": 0
},
"resultsOfContest": {
"contestWasTerminated": false,
"noPrizeType": 0,
"originalNoticeSentVia": 0,
"participantsContemplated": 0,
"participantsSme": 0,
"participantsForeign": 0,
"disagreeParticipantCountPublish": false,
"winners": [],
"disagreeWinnersPublish": false,
"disagreeValuePublish": false,
"validationState": 0
},
"tedNoDocExt": "2023-128779",
"attachments": [],
"hasAttachments": true,
"changes": [],
"isCorrigendum": false,
"isMigrated": false,
"isCancelled": false,
"isContractAwardCancellationNotice": false,
"cancelledReason": [],
"isLatest": true,
"language": "EN",
"proceduresForReview": {
"reviewBody": {
"officialName": "Markkinaoikeus",
"nutsCodes": [],
"postalAddress": {
"streetAddress": "S\u00f6rn\u00e4istenkatu 1",
"postalCode": "00580",
"town": "Helsinki",
"country": "FI"
},
"telephoneNumber": "+358 295643300",
"email": "[email protected]",
"mainUrl": "http:\/\/www.oikeus.fi\/markkinaoikeus",
"validationState": 0
},
"reviewProcedure": [],
"validationState": 0
},
"attachmentInformation": {
"description": [],
"links": [
{
"url": "https:\/\/www.vttresearch.com\/"
}
],
"validationState": 0
},
"rtpAttachmentInformation": {
"description": [],
"links": [],
"validationState": 0
},
"pcftAttachmentInformation": {
"description": [],
"links": [],
"validationState": 0
},
"modifications": {
"additionalCpvCodes": [],
"nutsCodes": [],
"mainsiteplaceWorksDelivery": [],
"descrProcurement": [],
"timeFrame": {
"type": 0,
"canBeRenewed": false
},
"justificationForDurationOverFourYears": [],
"justificationForDurationOverEightYears": [],
"totalValue": {},
"awardedToGroupOfEconomicOperators": false,
"contractors": [],
"description": [],
"reason": 0,
"reasonDescriptionEconomic": [],
"reasonDescriptionCircumstances": [],
"increaseBeforeModifications": {},
"increaseAfterModifications": {},
"validationState": 0
},
"contractAwardsDefence": [
{
"numberOfTenders": {
"disagreeTenderInformationToBePublished": false,
"total": 0
},
"contractor": {
"nutsCodes": [],
"postalAddress": {},
"isSmallMediumEnterprise": false,
"validationState": 0
},
"estimatedValue": {},
"contractValueType": 0,
"finalTotalValue": {},
"lowestOffer": {},
"highestOffer": {},
"annualOrMonthlyValue": {
"type": 0,
"canBeRenewed": false
},
"likelyToBeSubcontracted": false,
"valueOfSubcontract": {},
"valueOfSubcontractNotKnown": false,
"subcontractingDescription": [],
"allOrCertainSubcontractsWillBeAwarded": false,
"shareOfContractWillBeSubcontracted": false,
"validationState": 0
}
],
"hilmaStatistics": {
"energyEfficiencyConsidered": false,
"lowCarbon": false,
"circularEconomy": false,
"biodiversity": false,
"sustainableFoodProduction": false,
"justWorkingConditions": true,
"employmentCondition": false,
"codeOfConduct": true,
"innovationConsidered": true,
"solutionNewToBuyer": false,
"solutionNewToMarketOrIndustry": false,
"smeParticipationConsidered": true,
"validationState": 0
},
"isPrivateSmallValueProcurement": false,
"espdRequestReferences": [],
"hilmaSubmissionDate": "2023-05-16T13:32:25.3279901",
"dateCreated": "2023-05-16T13:32:25.0298416",
"dateModified": "2023-05-19T07:00:41.9323674"
}