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"IONTOF GmbH is the only manufacturer in the market that produce high sensitivity, high resolution and",
"Low Energy Ion Scattering (LEIS) spectrometer. LEIS uses 1 to 8 keV beam of noble gas ions and allows",
"to quantitatively analyse the outer (single) atomic layer for its elemental composition, so it is essential that the ion beam used for that does not modify this outer layer significantly. Therefore, the analyser must be optimised to achieve sufficient energy as well as angular resolution to separate even neighbouring heavy elements. Due to the intrinsic scattering peak width in LEIS, this requires using Ne or Ar scattering and energies up to 8 keV, beyond the traditional He scattering.",
"Simultaneously, a large solid angle of detection, high transmission, and parallel detection of energies must be applied to allow for sufficiently high sensitivity. The primary ion dose density on a given sample area must be limited to prevent noticeable sample modification while detecting enough scattered ions for good signal\/noise ratio.",
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"modification of the outer sample surface) it is a unique tool to apply LEIS to real world samples with excellent detection limits down to some 10 ppm of the outer atomic layer and reliable quantification. In practice the mass resolution of the instrument is sufficient to separate virtually all pairs of neighbouring (even heavy) elements. For example a mass resolution m\/dm > 35 is reached on Cu, so the isotopes 63 and 65 can be separated using peak fitting while still not changing the outer atomic layer.",
"",
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"scattering spectrometry (ISS) but the limitations of the hemispherical analyser prevent achieving high",
"resolution and high sensitivity simultaneously. Also, the ion beam is a broad beam without any lateral",
"resolution. This allows the application only with favourable combinations of elements (large difference in",
"mass) and moderate detection limits. In the UHV cluster of ALD center Finland there is already such an",
"option and hence the current purchase aims to take a major leap forward in performance.",
"",
"Consequently, the Qtac 100 allows a much wider range of samples and applications to be addressed: It offers true outer atomic layer analysis for practically relevant samples without limitation from ion beam damage, provides reliable quantification, analysis of patterned samples and excellent detection limits. Qtac 100 is the only device in the market that allows us to achieve next level of performance and our research goals; high resolution and high sensitivity simultaneously.",
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